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Bibliographic Record
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- Material Type
- 文書・図像類
- Author/Editor
- 山田 圭介大越 清紀齋藤 勇一織茂 貴雄大前 昭臣山田 尚人水橋 清
- Publication Date
- 2009-03
- Publication Date (W3CDTF)
- 2009-03
- Alternative Title
- Ion generation method for TIARA Ion Implanter
- Periodical title
- JAEA-Technology 2008-090
- Text Language Code
- jpn
- Target Audience
- 一般