文書・図像類

種結晶層を用いた低温結晶化シリコン薄膜の粒径制御

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種結晶層を用いた低温結晶化シリコン薄膜の粒径制御

Material type
文書・図像類
Author
堀田, 將
Publisher
-
Publication date
2012-05-07
Material Format
Digital
Capacity, size, etc.
-
NDC
-
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Notes on use

Note (General):

(ZrO_2)_<1-x>(Y_2O_3)_x:(YSZ)層上に非晶質Si(a-Si)薄膜を堆積して、YSZ 層の結晶化誘発効果によりSi 薄膜の低温固相結晶化を検討した。その結果、結晶化にはY 組成比Y/(Zr+Y)が0.15 以上必要であること、YSZ 層によりa-Si 薄膜が短時間で結晶化する...

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Digital

Material Type
文書・図像類
Author/Editor
堀田, 將
Author Heading
Publication Date
2012-05-07
Publication Date (W3CDTF)
2012-05-07
Alternative Title
Control of grain size in a low-temperature-crystallized Si film using seed layer
Periodical title
科学研究費補助金研究成果報告書
Pages
1-5
Text Language Code
jpn