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短時間結晶化を利用した次世代多結晶シリコン薄膜太陽電池作製技術の開発

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短時間結晶化を利用した次世代多結晶シリコン薄膜太陽電池作製技術の開発

Material type
文書・図像類
Author
大平, 圭介
Publisher
-
Publication date
2014-06-03
Material Format
Digital
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本研究では、ガラス基板上に形成した非晶質シリコン(a-Si)膜を、ミリ秒台の瞬間熱処理であるフラッシュランプアニール(FLA)により結晶化する太陽電池用多結晶Si膜形成において、高効率化に不向きなCr密着層を用いずに、Si膜の剥離を抑制する技術の確立を目的とした。凹凸構造をもつ透明導電膜付きガラス基...

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Digital

Material Type
文書・図像類
Title
短時間結晶化を利用した次世代多結晶シリコン薄膜太陽電池作製技術の開発
Author/Editor
大平, 圭介
Author Heading
大平, 圭介
Publication Date
2014-06-03
Publication Date (W3CDTF)
2014-06-03
Alternative Title
Development of the fabrication technology of next-generation polycrystalline silicon solar cells using rapid crystallization
Periodical title
科学研究費助成事業研究成果報告書
Pages
1-4
Text Language Code
jpn