シリコン酸化膜のフォトエッチング

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Material Type: 文書・図像類
Title: シリコン酸化膜のフォトエッチング
Author/Editor: KIKUMA, isao / FURUKOSHI, mitsuo MURANOI, tetsuo
Author Heading: KIKUMA, isao / FURUKOSHI, mitsuo MURANOI, tetsuo
Publication, Distribution, etc.: 茨城大学工学部
Publication Date: 1969-12
Publication Date (W3CDTF): 1969-12
Alternative Title: Photo Etching of Silicon Dioxide
Periodical title: 茨城大学工学部研究集報
No. or year of volume/issue: 17
Issue: 17
Pages: 157-163
Text Language Code: jpn
Target Audience: 一般
Note (General): application/pdf
研究報告書
Access Restrictions: 限定公開
Periodical Title (NCID): AN00016325
https://ci.nii.ac.jp/ncid/AN00016325
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 茨城大学 : 茨城大学学術情報リポジトリ