He+イオン照射した4H-SiCの残留弾性歪と欠陥の相互関係に関する顕微学的研究 [論文内容及び審査の要旨]

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Material Type: 博士論文
Title: He+イオン照射した4H-SiCの残留弾性歪と欠陥の相互関係に関する顕微学的研究 [論文内容及び審査の要旨]
Author/Editor: Yang, Subing
Author Heading: Yang, Subing
Publication, Distribution, etc.: Hokkaido University
Publication Date: 2020-09-25
Publication Date (W3CDTF): 2020-09-25
Alternative Title: Microscopy study of correlation between residual elastic strain and defects in He+ ion irradiated 4H-SiC [an abstract of dissertation and a summary of dissertation review]
Contributor: 柴山, 環樹
大沼, 正人
渡辺, 精一
Degree grantor/type: 北海道大学
Dissertation Number: 甲第14233号
Degree Type: 博士(工学)
Text Language Code: eng
jpn
NDC: 500
Target Audience: 一般
Note (General): (主査) 教授柴山環樹, 教授大沼正人, 教授渡辺精一
工学院（量子理工学専攻）
Access Restrictions: インターネット公開
References (URI): HDL
http://hdl.handle.net/2115/88806
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 北海道大学 : 北海道大学学術成果コレクション