透明酸化物導電膜のスパッタ成膜プロセスのin-situ解析

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Material Type: 博士論文
Title: 透明酸化物導電膜のスパッタ成膜プロセスのin-situ解析
Title Transcription: トウメイサンカブツドウデンマクノスパッタセイマクプロセスノ in situ カイセキ
Author/Editor: 塚本, 直樹
Author Heading: 塚本, 直樹ツカモト, ナオキ
Publication, Distribution, etc.: 青山学院大学
Publication Date: 2013
Publication Date (W3CDTF): 2013
Alternative Title: In-situ analysis on sputter deposition process for transparent conducting oxides
Periodical title: 博士学位論文 : 論文の内容の要旨及び審査の結果の要旨
No. or year of volume/issue: 66
Volume: 66
Pages: 99-112
Degree grantor/type: 青山学院大学
Date Granted: 2014-03-25
Dissertation Number: 甲第258号
Degree Type: 博士(理学)
Text Language Code: jpn
Target Audience: 一般
Access Restrictions: インターネット公開
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 青山学院大学 : 青山学院大学学術リポジトリ AURORA-IR