平面型リニアパルスモータの閉ループ精密位置決め

Material type: 文書・図像類

Author: 新宮, 博康ほか

Publisher: 愛知工業大学

Publication date: 1993-03-31

Material Format: Digital

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Note (General)：: A dual-axis positioning system of high accuracy has been developed using two Sawyer linear motors. The fundamental positioning characteristics of the ...

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Material Type: 文書・図像類
Title: 平面型リニアパルスモータの閉ループ精密位置決め
Author/Editor: 新宮, 博康
鷲見, 哲雄
野平, 重光
古橋, 秀夫
内田, 悦行
山田, 諄
Author Heading: 新宮, 博康
鷲見, 哲雄
野平, 重光
古橋, 秀夫
内田, 悦行
山田, 諄
Publication, Distribution, etc.: 愛知工業大学
Publication Date: 1993-03-31
Publication Date (W3CDTF): 1993-03-31
Alternative Title: ヘイメンガタリニアパルスモータノヘイループセイミツイチギメ
A Close Loop Positioning System of a Dual-Axis Linear Motor
Periodical title: 愛知工業大学研究報告. B, 専門関係論文集 = Bulletin of Aichi Institute of Technology. Part B
No. or year of volume/issue: 28
Volume: 28
Pages: 175-177
ISSN (Periodical Title): ISSN : 0387-0812
Text Language Code: jpn
Target Audience: 一般
Note (General): A dual-axis positioning system of high accuracy has been developed using two Sawyer linear motors. The fundamental positioning characteristics of the motor have been described. Maximum absolute positioning errors on the positioning plane were mechanically improved within 12 [μm]. A Fizeau-type laser interferometer with a resolution of 0.2[μm] was used for displacement measurement. The positioning accuracy has been improved within 1[μm] by using a microstep electric operation and a computer controlled close loop operation.
identifier:http://repository.aitech.ac.jp/dspace/handle/11133/929
Access Restrictions: 限定公開
Periodical Title (NCID): AN00007801
https://ci.nii.ac.jp/ncid/AN00007801
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 愛知工業大学 : 愛知工業大学学術情報リポジトリ