縦形放電励起エキシマレーザ中のプラズマの実験的研究

Material type: 文書・図像類

Author: 古橋, 秀夫ほか

Publisher: 愛知工業大学

Publication date: 1994-03-31

Material Format: Digital

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Note (General)：: Laser output characteristics of a longitudinal discharge XeCl excimer laser with automatic UV preionization were investigated. The dependences of the ...

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Material Type: 文書・図像類
Title: 縦形放電励起エキシマレーザ中のプラズマの実験的研究
Author/Editor: 古橋, 秀夫
内田, 悦行
山田, 諄
Author Heading: 古橋, 秀夫
内田, 悦行
山田, 諄
Publication, Distribution, etc.: 愛知工業大学
Publication Date: 1994-03-31
Publication Date (W3CDTF): 1994-03-31
Alternative Title: タテガタホウデンレイキエキシマレーザチュウノプラズマノジッケンテキケンキュウ
Experimental Investigations of Discharge Plasma of a Longitudinal Discharge Excimer Laser
Periodical title: 愛知工業大学研究報告. B, 専門関係論文集 = Bulletin of Aichi Institute of Technology. Part B
No. or year of volume/issue: 29
Volume: 29
Pages: 157-166
ISSN (Periodical Title): ISSN : 0387-0812
Text Language Code: eng
Target Audience: 一般
Note (General): Laser output characteristics of a longitudinal discharge XeCl excimer laser with automatic UV preionization were investigated. The dependences of the laser output peak powers on the buffer gas pressure, the Xe gas pressure and the HCl gas pressure in He/Xe/HCl and Ne/Xe/HCl were measured. The optimum gas mixtures were obtained. Time-dependent particle number densities of the excited components (Xe^<+*>, He^*) in the laser were measured by the laser absorption probing with a cw dye laser on the buffer gas pressure, the Xe partial gas pressure and the HCl partial gas pressure. The peak densities of the Xe^<+*> (6s^4P_<3/2>) ions and the He^* (2p ^3P) atoms were about 8×(10)^<10>(cm)^<-3> and 7×(10)^<11>(cm)^<-3>, respectively The densities were compared with those in transversal discharge XeCl excimer lasers. The formation dynamics of the XeCl excimer molecules, excited atoms and excited ions were discussed. The dependences of the particle number densities of the Xe^<+*> ions on the buffer gas pressure, the Xe gas pressure and the HCl gas pressure were investigated.
identifier:http://repository.aitech.ac.jp/dspace/handle/11133/940
Format (IMT): application/pdf
Source: http://repository.aitech.ac.jp/dspace/bitstream/11133/940/1/%e7%b4%80%e8%a6%8129%e5%8f%b7B%28P157-166%29.pdf
http://repository.aitech.ac.jp/dspace/bitstream/11133/940/1/%e7%b4%80%e8%a6%8129%e5%8f%b7B%28P157-166%29.pdf
Access Restrictions: 限定公開
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 愛知工業大学 : 愛知工業大学学術情報リポジトリ