放電励起ArFエキシマレーザーのシミュレーションモデル

Material type: 文書・図像類

Author: 古橋, 秀夫ほか

Publisher: 愛知工業大学

Publication date: 1999-03-31

Material Format: Digital

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Note (General)：: A simulation model of a discharge pumped ArF excimer laser was developed based on the Boltzmann transport equation, rate equations and the circuit equ...

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Material Type: 文書・図像類
Title: 放電励起ArFエキシマレーザーのシミュレーションモデル
Author/Editor: 古橋, 秀夫
内田, 悦行
Author Heading: 古橋, 秀夫
内田, 悦行
Publication, Distribution, etc.: 愛知工業大学
Publication Date: 1999-03-31
Publication Date (W3CDTF): 1999-03-31
Alternative Title: ホウデンレイキ ARF エキシマレーザーノシミュレーションモデル
Simulation Model of a Discharge Pumped ArF Excimer Laser
Periodical title: 愛知工業大学研究報告. B, 専門関係論文集 = Bulletin of Aichi Institute of Technology. Part B
No. or year of volume/issue: 34
Volume: 34
Pages: 145-151
ISSN (Periodical Title): ISSN : 0387-0812
Text Language Code: jpn
Target Audience: 一般
Note (General): A simulation model of a discharge pumped ArF excimer laser was developed based on the Boltzmann transport equation, rate equations and the circuit equation. Uniform plasma was assumed. It is one-dimensional model. Time histories of the laser output power, number densities of species in the plasma, currents and voltages were calculated numerically. The results were compared with the experimental results by spectroscopic methods. The peak-electron density, discharge voltage, and particle number densities agreed well, but their temporal behaviors differed.
identifier:http://repository.aitech.ac.jp/dspace/handle/11133/1072
Format (IMT): application/pdf
Source: http://repository.aitech.ac.jp/dspace/bitstream/11133/1072/1/%e7%b4%80%e8%a6%8134%e5%8f%b7B%28P145-151%29.pdf
http://repository.aitech.ac.jp/dspace/bitstream/11133/1072/1/%e7%b4%80%e8%a6%8134%e5%8f%b7B%28P145-151%29.pdf
Access Restrictions: 限定公開
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 愛知工業大学 : 愛知工業大学学術情報リポジトリ