SPMによる引掻き試験でシリコン単結晶に生じた微構造変化のTEM観察

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Author: 高木, 誠ほか

Publisher: 愛知工業大学

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Note (General)：: In this study, the microstructural change of the surface of Si single crystal (Si(100)) after the scratching tests under very small loading forces was...

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Material Type: 文書・図像類
Title: SPMによる引掻き試験でシリコン単結晶に生じた微構造変化のTEM観察
Author/Editor: 高木, 誠
小野寺, 健司
岩田, 博之
井村, 徹
佐々木, 勝寛
坂, 公恭
Author Heading: 高木, 誠
小野寺, 健司
岩田, 博之
井村, 徹
佐々木, 勝寛
坂, 公恭
Publication, Distribution, etc.: 愛知工業大学
Alternative Title: TEM Observation of Microstructural Change of Silicon Single Crystal Caused by Scratching Tests Using SPM
Periodical title: 総合技術研究所研究報告=Bulletin of Research Institute for Industrial Technology.
No. or year of volume/issue: 8
Volume: 8
Pages: 39-41
ISSN (Periodical Title): ISSN : 1344-9672
Text Language Code: eng
Target Audience: 一般
Note (General): In this study, the microstructural change of the surface of Si single crystal (Si(100)) after the scratching tests under very small loading forces was investigated. At first, line-scratching tests and scanning-scratching tests were carried out using an atomic force/friction force microscope (AFM/FFM). Next, cross-sectional TEM observations of the wear marks which were generated by the scratching tests were carried out. As a result of the TEM observations after the line-scratching tests, it was found that dislocations were observed in the area of less than 100nm thickness from the surface of the wear marks which were formed under the loading forces of more than 5μN. In the case of the loading forces of more than 20μN, an amorphous region was also observed just under the wear marks. As a result of the TEM observations after the scanning-scratching tests, it was found that the introduction of dislocations took place and no amorphous region appeared. It was also found that the several atomic layers at the top surface of the wear marks shifted in parallel to (100).
identifier:http://repository.aitech.ac.jp/dspace/handle/11133/1654
Format (IMT): application/pdf
Source: http://repository.aitech.ac.jp/dspace/bitstream/11133/1654/1/%e7%b7%8f%e7%a0%948%e5%8f%b7%28P39-41%29.pdf
http://repository.aitech.ac.jp/dspace/bitstream/11133/1654/1/%e7%b7%8f%e7%a0%948%e5%8f%b7%28P39-41%29.pdf
Access Restrictions: 限定公開
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 愛知工業大学 : 愛知工業大学学術情報リポジトリ