SPMを用いたSi単結晶のナノ加工と表面の構造変化

Material type: 文書・図像類

Author: 高木, 誠ほか

Publisher: 愛知工業大学

Publication date: 2010-09-06

Material Format: Digital

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Note (General)：: The fabricating methods of nanoscale shapes on Si (100) surface by using atomic force microscope (AFM) and scanning tunneling microscope (STM) were in...

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Material Type: 文書・図像類
Title: SPMを用いたSi単結晶のナノ加工と表面の構造変化
Author/Editor: 高木, 誠
松室, 昭仁
岩田, 博之
Author Heading: 高木, 誠
松室, 昭仁
岩田, 博之
Publication, Distribution, etc.: 愛知工業大学
Publication Date: 2010-09-06
Publication Date (W3CDTF): 2010-09-06
Alternative Title: SPM　ヲ　モチイタ　Si　タンケッショウ　ノ　ナノ　カコウ　ト　ヒョウメン　ノ　コウゾウ　ヘンカ
Nanoprocessing on Silicon (100) Surface by Using SPM and the Study of the Structural Change
Periodical title: 総合技術研究所研究報告=Bulletin of Research Institute for Industrial Technology.
No. or year of volume/issue: 12
Volume: 12
Pages: 63-67
ISSN (Periodical Title): ISSN : 1344-9672
Text Language Code: jpn
Target Audience: 一般
Note (General): The fabricating methods of nanoscale shapes on Si (100) surface by using atomic force microscope (AFM) and scanning tunneling microscope (STM) were investigated. As a result, nanoscale grooves and faces were fabricated by the scratching methods using AFM. The scratching loads had a major influence on these shapes. Nanoscale pits, grooves and faces were fabricated by STM as a result of controlling the sample bias voltage and the tip curvature radius of tungsten probes. Cross-sectional TEM observations of the nanoscale grooves and faces fabricated by AFM and STM were carried out to study the microstructural changes of Si single crystals. As a result of the TEM observations, it was found that many dislocations and an amorphous appeared in the surface of the grooves and faces fabricated by AFM. On the other hand, the single crystalline structure without a dislocation was preserved in the surface of the grooves and faces fabricated by STM. Based on these results, itis considered that the fabricating mechanisms of AFM and STM are a mechanical processing and an electric field evaporation, respectively.
identifier:http://repository.aitech.ac.jp/dspace/handle/11133/1726
Format (IMT): application/pdf
Source: http://repository.aitech.ac.jp/dspace/bitstream/11133/1726/1/%e7%b7%8f%e7%a0%9412%e5%8f%b7%28P63-67%29.pdf
http://repository.aitech.ac.jp/dspace/bitstream/11133/1726/1/%e7%b7%8f%e7%a0%9412%e5%8f%b7%28P63-67%29.pdf
Access Restrictions: 限定公開
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 愛知工業大学 : 愛知工業大学学術情報リポジトリ