SPMを用いたSi単結晶のナノ加工と表面の構造変化

Material type: 文書・図像類

Author: 高木, 誠ほか

Publisher: 愛知工業大学

Publication date: 2010-09-06

Material Format: Digital

Capacity, size, etc.: -

NDC: -

View All

Notes on use

Note (General)：: The fabricating methods of nanoscale shapes on Si (100) surface by using atomic force microscope (AFM) and scanning tunneling microscope (STM) were in...

Search by Bookstore

Holdings of Libraries in Japan

This page shows libraries in Japan other than the National Diet Library that hold the material.

List of Cooperating Institutions and Databases

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

AIT Associated Repository of Academic Resources
Digital
You can check the holdings of institutions and databases with which Institutional Repositories DataBase(IRDB)(Institutional Repository) is linked at the site of Institutional Repositories DataBase(IRDB)(Institutional Repository).
AIT Associated Repository of Academic Resources

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Digital

Material Type: 文書・図像類
Title: SPMを用いたSi単結晶のナノ加工と表面の構造変化
Author/Editor: 高木, 誠
松室, 昭仁
岩田, 博之
Author Heading: 高木, 誠
松室, 昭仁
岩田, 博之
Publication, Distribution, etc.: 愛知工業大学
Publication Date: 2010-09-06
Publication Date (W3CDTF): 2010-09-06
Alternative Title: SPM　ヲ　モチイタ　Si　タンケッショウ　ノ　ナノ　カコウ　ト　ヒョウメン　ノ　コウゾウ　ヘンカ
Nanoprocessing on Silicon (100) Surface by Using SPM and the Study of the Structural Change
Periodical title: 総合技術研究所研究報告=Bulletin of Research Institute for Industrial Technology.
No. or year of volume/issue: 12
Volume: 12
Pages: 63-67
ISSN (Periodical Title): ISSN : 1344-9672
Text Language Code: jpn
Target Audience: 一般
Note (General): The fabricating methods of nanoscale shapes on Si (100) surface by using atomic force microscope (AFM) and scanning tunneling microscope (STM) were investigated. As a result, nanoscale grooves and faces were fabricated by the scratching methods using AFM. The scratching loads had a major influence on these shapes. Nanoscale pits, grooves and faces were fabricated by STM as a result of controlling the sample bias voltage and the tip curvature radius of tungsten probes. Cross-sectional TEM observations of the nanoscale grooves and faces fabricated by AFM and STM were carried out to study the microstructural changes of Si single crystals. As a result of the TEM observations, it was found that many dislocations and an amorphous appeared in the surface of the grooves and faces fabricated by AFM. On the other hand, the single crystalline structure without a dislocation was preserved in the surface of the grooves and faces fabricated by STM. Based on these results, itis considered that the fabricating mechanisms of AFM and STM are a mechanical processing and an electric field evaporation, respectively.
identifier:http://repository.aitech.ac.jp/dspace/handle/11133/1726
Access Restrictions: 限定公開
Periodical Title (NCID): AA11484797
https://ci.nii.ac.jp/ncid/AA11484797
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 愛知工業大学 : 愛知工業大学学術情報リポジトリ