自己伝播発熱素材と光技術によるウェハ接合技術開発とその応用

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Material Type: 文書・図像類
Title: 自己伝播発熱素材と光技術によるウェハ接合技術開発とその応用
Author/Editor: 生津, 資大
河口, 大祐
伊ヶ崎, 泰則
Author Heading: 生津, 資大
河口, 大祐
伊ヶ崎, 泰則
Publication, Distribution, etc.: 愛知工業大学
Publication Date: 2019-12-30
Publication Date (W3CDTF): 2019-12-30
Alternative Title: ジコデンパハツネツソザイトヒカリギジュツニヨルウェハセツゴウギジュツカイハツトソノオウヨウ
Periodical title: 総合技術研究所研究報告=Bulletin of Research Institute for Industrial Technology.
No. or year of volume/issue: 21
Volume: 21
Pages: 23-24
ISSN (Periodical Title): ISSN : 1344-9672
Text Language Code: jpn
Subject Heading: 自己伝播発熱材料
瞬間反応接合
ステルスダイシング
Target Audience: 一般
Note (General): identifier:http://repository.aitech.ac.jp/dspace/handle/11133/3617
Access Restrictions: 限定公開
Periodical Title (NCID): AA11484797
https://ci.nii.ac.jp/ncid/AA11484797
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 愛知工業大学 : 愛知工業大学学術情報リポジトリ