切断加工したシリコン単結晶の強度に及ぼす後加工の効果

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Material Type: 文書・図像類
Title: 切断加工したシリコン単結晶の強度に及ぼす後加工の効果
Author/Editor: 高木, 誠
岩田, 博之
坂, 公恭
河口, 大祐
Author Heading: 高木, 誠
岩田, 博之
坂, 公恭
河口, 大祐
Publication, Distribution, etc.: 愛知工業大学
Publication Date: 2019-12-30
Publication Date (W3CDTF): 2019-12-30
Alternative Title: セツダンカコウシタシリコンタンケッショウノキョウドニオヨボスアトカコウノコウカ
Periodical title: 総合技術研究所研究報告=Bulletin of Research Institute for Industrial Technology.
No. or year of volume/issue: 21
Volume: 21
Pages: 120-121
ISSN (Periodical Title): ISSN : 1344-9672
Text Language Code: jpn
Subject Heading: シリコン単結晶
切断加工
透過型電子顕微鏡
Target Audience: 一般
Note (General): identifier:http://repository.aitech.ac.jp/dspace/handle/11133/3631
Access Restrictions: 限定公開
Periodical Title (NCID): AA11484797
https://ci.nii.ac.jp/ncid/AA11484797
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 愛知工業大学 : 愛知工業大学学術情報リポジトリ