パルスレーザ照射により生ずるSi中ボイド近傍の性状

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Material Type: 文書・図像類
Title: パルスレーザ照射により生ずるSi中ボイド近傍の性状
Author/Editor: 岩田, 博之
河口, 大祐
坂, 公恭
Author Heading: 岩田, 博之
河口, 大祐
坂, 公恭
Publication, Distribution, etc.: 愛知工業大学
Publication Date: 2019-12-30
Publication Date (W3CDTF): 2019-12-30
Alternative Title: パルスレーザショウシャニヨリショウズル Siチュウボイドキンボウノセイジョウ
Periodical title: 総合技術研究所研究報告=Bulletin of Research Institute for Industrial Technology.
No. or year of volume/issue: 21
Volume: 21
Pages: 92-94
ISSN (Periodical Title): ISSN : 1344-9672
Text Language Code: jpn
Subject Heading: TEM
STEM
ステルスダイシング
ボイド
転位
Target Audience: 一般
Note (General): identifier:http://repository.aitech.ac.jp/dspace/handle/11133/3650
Access Restrictions: 限定公開
Periodical Title (NCID): AA11484797
https://ci.nii.ac.jp/ncid/AA11484797
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 愛知工業大学 : 愛知工業大学学術情報リポジトリ