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半導体デバイス洗浄における機械学習を用いた静電気障害の予知技術の確立

半導体デバイス洗浄における機械学習を用いた静電気障害の予知技術の確立

Material type
その他
Author
清家, 善之ほか
Publisher
愛知工業大学
Publication date
2022-10
Material Format
Digital
Capacity, size, etc.
-
NDC
-
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Note (General):

出版タイプ: NAidentifier:http://repository.aitech.ac.jp/dspace/handle/11133/4125

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Digital

Material Type
その他
Author/Editor
清家, 善之
森, 竜雄
一野, 祐亮
瀬川, 大司
加藤, 幹大
宮地, 計二
Publication, Distribution, etc.
Publication Date
2022-10
Publication Date (W3CDTF)
2022
Alternative Title
ハンドウタイ デバイス センジョウ ニオケル キカイ ガクシュウ オ モチイタ セイデンキ ショウガイ ノ ヨチ ギジュツ ノ カクリツ
Periodical title
総合技術研究所研究報告=Bulletin of Research Institute for Industrial Technology.
No. or year of volume/issue
24