Raw data files for Fig. 8 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
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- Material Type
- 文書・図像類
- Author/Editor
- OGIWARA, ToshiyaNAGATA, TakahiroYOSHIKAWA, Hideki
- Author Heading
- Publication Date
- 2022-11-15
- Publication Date (W3CDTF)
- 2022-11-15
- Text Language Code
- jpn
- Target Audience
- 一般
- DOI
- 10.48505/nims.3736