Raw data files for Fig. 11 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

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Raw data files for Fig. 11 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

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Material Type: 文書・図像類
Title: Raw data files for Fig. 11 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Author/Editor: OGIWARA, Toshiya
NAGATA, Takahiro
YOSHIKAWA, Hideki
Author Heading: OGIWARA, Toshiya
https://orcid.org/0000-0002-7376-6571
NAGATA, Takahiro
https://orcid.org/0000-0002-8591-2943
YOSHIKAWA, Hideki
https://orcid.org/0000-0002-7389-8865
Publication Date: 2019-03-07
Publication Date (W3CDTF): 2019-03-07
Text Language Code: jpn
Subject Heading: Auger depth profiling analysis
HfO2/Si
Ultra low angle incidence ion beam
Target Audience: 一般
DOI: 10.48505/nims.4218
Access Restrictions: インターネット公開
Related Material (DOI): 10.1384/jsa.24.192
10.48505/nims.4193
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 物質・材料研究機構 : Materials Data Repository