High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures

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Material Type: 文書・図像類
Title: High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures
Author/Editor: Guo Chen
Zilong Zhang
Keyun Gu
Liwen Sang
Satoshi Koizumi
Masaya Toda
Yasuo Koide
Zhaohui Huang
Meiyong Liao
Author Heading: Guo Chen
Zilong Zhang
Keyun Gu
Liwen Sang
Satoshi Koizumi
https://orcid.org/0000-0003-4961-5658
Masaya Toda
Yasuo Koide
https://orcid.org/0000-0001-8321-9822
Zhaohui Huang
Meiyong Liao
https://orcid.org/0000-0003-1361-4266
Publication, Distribution, etc.: IEEE
Publication Date: 2024-05-02
Publication Date (W3CDTF): 2024-05-02
Periodical title: 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Pages: 1-4
ISSN (Periodical Title): ISSN : 24743755
Text Language Code: eng
Subject Heading: Diamond, MEMS
Target Audience: 一般
DOI: 10.48505/nims.4839
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 物質・材料研究機構 : Materials Data Repository