Frequency Stability of Higher Order Modes Diamond MEMS Resonator

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Material Type: 文書・図像類
Title: Frequency Stability of Higher Order Modes Diamond MEMS Resonator
Author/Editor: ザオウェン
顧克云
陳果
ジャンジロン
小泉聡
小出康夫
廖梅勇
Author Heading: ザオウェン
顧克云
陳果
ジャンジロン
小泉聡
https://orcid.org/0000-0003-4961-5658
小出康夫
https://orcid.org/0000-0001-8321-9822
廖梅勇
https://orcid.org/0000-0003-1361-4266
Text Language Code: eng
Subject Heading: Diamond
MEMS
Target Audience: 一般
DOI: 10.48505/nims.5088
Access Restrictions: インターネット公開
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 物質・材料研究機構 : Materials Data Repository