Development of automated tip preparation for atom probe tomography by using script-controlled FIB-SEM

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学術機関リポジトリデータベース（IRDB）（機関リポジトリ）

Development of automated tip preparation for atom probe tomography by using script-controlled FIB-SEM

Material type: 記事

Author: Jun Uzuhashiほか

Publisher: Elsevier BV

Publication date: 2023-5

Material Format: Digital

Journal name: ULTRAMICROSCOPY 247

Publication Page: p.113704-113704

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Note (General)：: 出版タイプ： AM

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Material Type: 記事
Title: Development of automated tip preparation for atom probe tomography by using script-controlled FIB-SEM
Author/Editor: Jun Uzuhashi
Tadakatsu Ohkubo
Kazuhiro Hono
Author Heading: Jun Uzuhashi
https://orcid.org/0000-0003-2023-8158
Tadakatsu Ohkubo
https://orcid.org/0000-0003-3548-1951
Kazuhiro Hono
https://orcid.org/0000-0001-7367-0193
Publication, Distribution, etc.: Elsevier BV
Publication Date: 2023-5
Publication Date (W3CDTF): 2023
Periodical title: ULTRAMICROSCOPY
No. or year of volume/issue: 247
Volume: 247
Pages: 113704-113704
ISSN (Periodical Title): ISSN : 03043991
Subject Heading: atom probe tomography
focused ion beam
scanning electron microscopy
automation
Target Audience: 一般
Note (General): 出版タイプ： AM
DOI: 10.48505/nims.4208
https://doi.org/10.48505/nims.4208
Format (IMT): application/pdf
Source: Development of automated tip preparation for atom probe tomography by using script-controlled FIB-SEM.pdf （fulltext）
https://mdr.nims.go.jp/filesets/a449dae9-d330-42f6-b3a1-a50967711915/download
Access Restrictions: インターネット公開
Rights (production): Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 物質・材料研究機構 : Materials Data Repository