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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 図書
- Title
- Title Transcription
- ﾁｮｳ ｴﾙｴｽｱｲ ｾｲｿﾞｳ ｼｹﾝ ｿｳﾁ ｶﾞｲﾄﾞﾌﾞｯｸ
- Volume
- １９８９年版
- Author/Editor
- 工業調査会 編
- Series Title
- Title Heading
- 超ＬＳＩ製造・試験装置ガイドブック ﾁｮｳ ｴﾙｴｽｱｲ ｾｲｿﾞｳ ｼｹﾝ ｿｳﾁ ｶﾞｲﾄﾞﾌﾞｯｸ
- Author Heading
- 工業調査会 ｺｳｷﾞｮｳ, ﾁｮｳｻｶｲ
- Publication, Distribution, etc.
- Publication Date
- １９８８１２