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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 図書
- Title
- Title Transcription
- ﾁｮｳ ｴﾙｴｽｱｲ ｾｲｿﾞｳ ｼｹﾝ ｿｳﾁ ｶﾞｲﾄﾞﾌﾞｯｸ
- Volume
- １９８７年版
- Series Title
- Title Heading
- 超ＬＳＩ製造・試験装置ガイドブック ﾁｮｳ ｴﾙｴｽｱｲ ｾｲｿﾞｳ ｼｹﾝ ｿｳﾁ ｶﾞｲﾄﾞﾌﾞｯｸ
- Publication, Distribution, etc.
- Publication Date
- １９８６１１
- Publication Date (W3CDTF)
- 1986
- Extent
- ２６０，４２ｐ ; ２６ｃｍ