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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 図書
- Title Transcription
- チョウ ビサイ デンシ カイロ ジツケン シセツ ケンキュウ ホウコク スーパー クリーン ルーム ギジュツ トクシュウ
- Volume
- 3
- Author/Editor
- 東北大学電気通信研究所／編
- Author Heading
- 東北大学電気通信研究所 トウホクダイガクデンキツウシンケン
- Publication, Distribution, etc.
- Publication Date
- 1990.04
- Publication Date (W3CDTF)
- 1990-04
- Extent
- 790p26cm