半導体製造装置データブック

半導体製造装置データブック = Semiconductor equipment data book

Volumes of this title

2014

2013

2012

2011

2010

Notes on use

Related materials as well as pre- and post-revision versions

Search by Bookstore

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 雑誌
Title: 半導体製造装置データブック
Title Transcription: ハンドウタイセイゾウソウチデータブック
Author Heading: 電子ジャーナルデンシジャーナル ( 01045417 )Authorities
Publication, Distribution, etc.: 東京 : 電子ジャーナル
Publication Date: 1994-2014
Publication Date (W3CDTF): 1994
2014
Publication status: 刊行終了
Year and volume of publication: 1994-2014
Note (Suspension or discontinuance of publication): 以後廃刊
Extent: 冊
Size: 28cm
Alternative Title: Semiconductor equipment data book Semiconductor equipment data book
Semiconductor equipment data book
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZD61
ZN33
Note (General): 本タイトル等は最新号による
Holding library: 国立国会図書館
Year and volume of holding: 1994-2014
Call No.: Z3-B317
Is Version Of: 異版
https://ndlsearch.ndl.go.jp/books/R100000002-I000011095313
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000093723
http://id.ndl.go.jp/bib/000000093723
National Bibliography No. (JPNO): 00099468
Cataloging Rule: National Diet Library Cataloging Rules for Serials
Bibliographic Record Category (NDL): 131