Journal of vacuum science & technology 21(1)-21(2):1982.5/1982.6-1982.7/1982.8

Journal of vacuum science & technology

21(1)-21(2):1982.5/1982.6-1982.7/1982.8

Publisher: Published for the American Vacuum Society by the American Institute of Physics

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Note (General)：: Description based on the latest issue"An official publication of the American Vacuum Society"

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Material Type: 雑誌
Title: Journal of vacuum science & technology
Volume: 21(1)-21(2):1982.5/1982.6-1982.7/1982.8
Publication, Distribution, etc.: New York, N.Y. : Published for the American Vacuum Society by the American Institute of Physics
Publication Date: 1982
Publication Date (W3CDTF): 1982
ISSN (Periodical Title): 0022-5355
Place of Publication (Country Code): US
Text Language Code: eng
NDLC: ZM35
ZN15
Note (General): Description based on the latest issue
"An official publication of the American Vacuum Society"
Holding library: 国立国会図書館
Call No.: Z53-M259
Continues: 分割後 : Journal of vacuum science & technology. A
https://ndlsearch.ndl.go.jp/books/R100000002-I000000131402
分割後 : Journal of Vacuum Science & Technology. B, Microelectronics Processing and Phenomena
https://ndlsearch.ndl.go.jp/books/R100000002-I000000131403
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000126556
http://id.ndl.go.jp/bib/000000126556
Cataloging Rule: National Diet Library Cataloging Rules for Serials