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Bibliographic Record
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- Material Type
- 雑誌
- ISSN
- 0020-9066
- Title
- Author/Editor
- International Union for Vacuum Science, Technique and Applications
- Publication status
- 不明
- Publication frequency
- Irregular
- Extent
- v.
- Size
- 30 cm
- Text Language Code
- eng
- NDLC