Book of SEMI Standards 19930000(Facility Standards and Safety Guidelines)

Book of SEMI Standards

19930000(Facility Standards and Safety Guidelines)

Notes on use

Note (General)：: Description based on the latest issueConsists of several vols

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Material Type: 雑誌
Title: Book of SEMI Standards
Volume: 19930000(Facility Standards and Safety Guidelines)
Publication, Distribution, etc.: Mountain View, Calif. : Semiconductor Equipment and Materials International
Publication Date: 1993
Publication Date (W3CDTF): 1993
Size: 28 cm
Alternative Title: SEMI International Standards
ISSN (Periodical Title): 0734-1903
Place of Publication (Country Code): US
Text Language Code: eng
NDLC: ZM35
Note (General): Description based on the latest issue
Consists of several vols
Holding library: 国立国会図書館
Call No.: Z63-C121
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000151623
http://id.ndl.go.jp/bib/000000151623
Cataloging Rule: National Diet Library Cataloging Rules for Serials