Book of SEMI Standards 19930000(Materials)

Book of SEMI Standards

19930000(Materials)

Notes on use

Note (General)：: Description based on the latest issueConsists of several vols

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 雑誌
ISSN: 0734-1903
Title: Book of SEMI Standards
Volume: 19930000(Materials)
Publication, Distribution, etc.: Mountain View, Calif. : Semiconductor Equipment and Materials International
Publication Date: 1993
Publication Date (W3CDTF): 1993
Size: 28 cm
Alternative Title: SEMI International Standards
Place of Publication (Country Code): US
Text Language Code: eng
NDLC: ZM35
Note (General): Description based on the latest issue
Consists of several vols
Holding library: 国立国会図書館
Call No.: Z63-C121
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000151623
http://id.ndl.go.jp/bib/000000151623
Cataloging Rule: National Diet Library Cataloging Rules for Serials
Bibliographic Record Category (NDL): 231