Journal of Vacuum Science & Technology B : nanotechnology & microelectronics: materials, processing, measurement, & phenomena 41(2):2023.3/4

Journal of Vacuum Science & Technology. B : nanotechnology & microelectronics: materials, processing, measurement, & phenomena

41(2):2023.3/4

Publisher: Published for the American Vacuum Society by the American Institute of Physics

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Note (General)：: Description based on the latest issueVariant title: JVST. BSubtitle varies

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Material Type: 雑誌
Title: Journal of Vacuum Science & Technology
Volume: B : nanotechnology & microelectronics: materials, processing, measurement, & phenomena
41(2):2023.3/4
Publication, Distribution, etc.: New York, N.Y. : Published for the American Vacuum Society by the American Institute of Physics
Publication Date: 2023
Publication Date (W3CDTF): 2023
Size: 28cm
Alternative Title: JVST. B
Journal of vacuum science & technology. B
ISSN (Periodical Title): 1071-1023
2166-2746
Place of Publication (Country Code): US
Text Language Code: eng
Content Type: text
Media Type: unmediated
Carrier Type: volume
NDLC: ZM35
ZN33
Note (General): Description based on the latest issue
Variant title: JVST. B
Subtitle varies
Holding library: 国立国会図書館
Call No.: Z53-Y133
Replaces: 継続前
https://ndlsearch.ndl.go.jp/books/R100000002-I000000131403
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000156914
http://id.ndl.go.jp/bib/000000156914
Cataloging Rule: National Diet Library Cataloging Rules for Serials