Studies on self-alignment metal-insulator-semiconductor processes

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Material Type: 博士論文
Title: Studies on self-alignment metal-insulator-semiconductor processes
Author/Editor: 山内規義 [著]
Author Heading: 山内, 規義ヤマウチ, ノリヨシ
Extent: 冊
Alternative Title: 自己整合Metal-insulator-semiconductorプロセスに関する研究ジコセイゴウ Metal - insulator - semiconductor プロセスニカンスルケンキュウ
Degree grantor/type: 九州大学
Date Granted: 昭和61年4月28日
Date Granted (W3CDTF): 1986
Dissertation Number: 乙第3717号
Degree Type: 工学博士
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
UT31
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-61-M521
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000169774
http://id.ndl.go.jp/bib/000000169774
Bibliographic Record Category (NDL): 213