A study on plasma polymerization : optimization of the conditions and evaluation of the plasma-polymerized films in an inductively coupled glow discharge system

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Material Type: 博士論文
Title: A study on plasma polymerization : optimization of the conditions and evaluation of the plasma-polymerized films in an inductively coupled glow discharge system
Author/Editor: 広津敏博 [著]
Author Heading: 広津, 敏博ヒロツ, トシヒロ
Extent: 冊
Alternative Title: プラズマ重合の研究 : 誘導結合グロー放電系における放電条件の最適化とプラズマ重合膜の評価プラズマジュウゴウノケンキュウ : ユウドウケツゴウグローホウデンケイニオケルホウデンジョウケンノサイテキカトプラズマジュウゴウマクノヒョウカ
Degree grantor/type: 東京工業大学
Date Granted: 昭和59年5月31日
Date Granted (W3CDTF): 1984
Dissertation Number: 乙第1353号
Degree Type: 工学博士
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
UT31
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-60-O174
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000175894
http://id.ndl.go.jp/bib/000000175894
Bibliographic Record Category (NDL): 213