図書

ULSIプロセス材料実務便覧

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ULSIプロセス材料実務便覧

Call No. (NDL)
ND386-E183
Bibliographic ID of National Diet Library
000002192233
Material type
図書
Author
津屋, 英樹, 1938-
Publisher
サイエンスフォーラム
Publication date
1992.1
Material Format
Paper
Capacity, size, etc.
477p ; 31cm
NDC
549.7
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Notes on use

Note (General):

監修: 津屋英樹

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Paper

Material Type
図書
Title Transcription
ユーエルエスアイ プロセス ザイリョウ ジツム ベンラン
Author Heading
津屋, 英樹, 1938- ツヤ, ヒデキ, 1938- ( 00222561 )Authorities
Publication, Distribution, etc.
Publication Date
1992.1
Publication Date (W3CDTF)
1992
Extent
477p
Size
31cm
Place of Publication (Country Code)
JP