Proceedings of the 2nd International Conference on Reactive Plasmas and 11th Symposium on Plasma Processing, January 19-21, 1994, Pacifico Yokohama, Yokohama, Japan

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Note (General)：: "Sponsored by the Japan Society of Applied Physics, cosponsored by Nagoya Industrial Research Institute."."AP941204"--Cover.Includes bibliographical r...

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Material Type: 図書
Title: Proceedings of the 2nd International Conference on Reactive Plasmas and 11th Symposium on Plasma Processing, January 19-21, 1994, Pacifico Yokohama, Yokohama, Japan
Author/Editor: edited by Toshio Goto
Author Heading: 後藤, 俊夫, 1941- ゴトウ, トシオ, 1941- ( 00292248 )Authorities
Publication, Distribution, etc.: [Nagoya] : Organizing Committee of ICRP-2/SPP-11
Publication Date: [1994]
Publication Date (W3CDTF): 1994
Extent: xv, 784, 17 p. : ill.
Size: 26 cm
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: M15
MC241
Target Audience: 一般
Note (General): "Sponsored by the Japan Society of Applied Physics, cosponsored by Nagoya Industrial Research Institute."."AP941204"--Cover.Includes bibliographical references and index
Holding library: 国立国会図書館
Call No.: M15-A9387
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000002435351
http://id.ndl.go.jp/bib/000002435351
National Bibliography No. (JPNO): 95080972
Cataloging Rule: Nippon Cataloging Rules, Preliminary New Edition
Bibliographic Record Category (NDL): 113