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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 図書
- Title
- Title Transcription
- シャダン ホウジン ニホン ハンドウタイ セイゾウ ソウチ キョウカイ カイイン メイボ
- Volume
- 1996
- Author Heading
- 日本半導体製造装置協会 ニホン ハンドウタイ セイゾウ ソウチ キョウカイ ( 00293650 )Authorities
- Publication, Distribution, etc.
- Publication Date
- 1996.10
- Publication Date (W3CDTF)
- 1996
- Extent
- 143p
- Size
- 26cm