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図書

ウェーハ表面完全性の創成・評価技術

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ウェーハ表面完全性の創成・評価技術

Call No. (NDL)
ND371-G81
Bibliographic ID of National Diet Library
000002701621
Material type
図書
Author
津屋英樹 編
Publisher
サイエンスフォーラム
Publication date
1998.3
Material Format
Paper
Capacity, size, etc.
269p ; 31cm
NDC
549.8
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Paper

Material Type
図書
ISBN
4-916164-14-8
Title Transcription
ウェーハ ヒョウメン カンゼンセイ ノ ソウセイ ヒョウカ ギジュツ
Author/Editor
津屋英樹 編
Author Heading
津屋, 英樹, 1938- ツヤ, ヒデキ, 1938- ( 00222561 )Authorities
Publication, Distribution, etc.
Publication Date
1998.3
Publication Date (W3CDTF)
1998
Extent
269p