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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 図書
- Title Transcription
- STEP 300mm semiconductor equipment コウエン ヨコウシュウ
- Author/Editor
- 本間三智夫, 鷲野純子 編
- Series Title
- Author Heading
- 本間, 三智夫 ホンマ, ミチオ ( 00807683 )Authorities鷲野, 純子 ワシノ, ジュンコ ( 00806874 )Authorities
- Publication, Distribution, etc.
- Publication Date
- 1999.4
- Publication Date (W3CDTF)
- 1999
- Extent
- 101p