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Bibliographic Record
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- Material Type
- 図書
- ISBN
- 4-88420-008-X
- Title Transcription
- Book of SEMI standards : ニホンゴバン
- Volume
- 2000 第6分冊
- Author Heading
- SEMIジャパン SEMI ジャパン ( 00299615 )Authorities
- Publication, Distribution, etc.
- Publication Date
- 2001.5
- Publication Date (W3CDTF)
- 2001
- Extent
- 466, 144, 138p