Semiconductor microlithography VI : March 30-31, 1981, San Jose, California / Jim Dey, editor. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 275)

Semiconductor microlithography VI : March 30-31, 1981, San Jose, California / Jim Dey, editor.

(Proceedings of SPIE--the International Society for Optical Engineering ; v. 275)

Call No. (NDL): M15-A5132
Bibliographic ID of National Diet Library: 000003092343

Material type: 図書

Author: Dey, Jim.ほか

Publisher: SPIE--the International Society for Optical Engineering

Publication date: c1981.

Material Format: Paper

Capacity, size, etc.: vi, 221 p. : ill. ; 28 cm.

NDC: -

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Paper

Material Type: 図書
ISBN: 0892523085 (pbk.)
Title: Semiconductor microlithography VI : March 30-31, 1981, San Jose, California / Jim Dey, editor.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 275
Author Heading: Dey, Jim.
Society of Photo-optical Instrumentation Engineers.
Publication, Distribution, etc.: Bellingham, Wash. : SPIE--the International Society for Optical Engineering
Publication Date: c1981.
Publication Date (W3CDTF): 1981
Extent: vi, 221 p. : ill. ; 28 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Semiconductors -- Congresses.
Microlithography -- Congresses.
LCC: TK7871.85
DDC: 621.381/73
NDLC: M15
ND
Note (Bibliography): Includes bibliographical references and indexes.
Holding library: 国立国会図書館
Call No.: M15-A5132
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003092343
http://id.ndl.go.jp/bib/000003092343
LC Control Number: 81051405 //r853
https://lccn.loc.gov/81051405
Bibliographic Record Category (NDL): 211