Proceedings of the Symposium on Inorganic Resist Systems / edited by Daryl Ann Doane, Adam Heller ; [cosponsored by] Dielectrics and Insulation and Electronics Divisions and New Technology Subcommittee. (Proceedings)

Proceedings of the Symposium on Inorganic Resist Systems / edited by Daryl Ann Doane, Adam Heller ; [cosponsored by] Dielectrics and Insulation and Electronics Divisions and New Technology Subcommittee.

(Proceedings)

Call No. (NDL): M15-A4170
Bibliographic ID of National Diet Library: 000003107419

Material type: 図書

Author: Symposium on Inorganic Resist Systems (1982 : Montréal, Québec)ほか

Publisher: Electrochemical Society

Publication date: c1982.

Material Format: Paper

Capacity, size, etc.: vii, 310 p. : ill. ; 23 cm.

NDC: -

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Notes on use

Note (General)：: Title on spine: Inorganic resist systems.

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Paper

Material Type: 図書
Title: Proceedings of the Symposium on Inorganic Resist Systems / edited by Daryl Ann Doane, Adam Heller ; [cosponsored by] Dielectrics and Insulation and Electronics Divisions and New Technology Subcommittee.
Series Title: Proceedings
Author/Editor (Series Title): Electrochemical Society
v. 82-9
Title Heading: Proceedings (Electrochemical Society) ; v. 82-9.
Author Heading: Symposium on Inorganic Resist Systems (1982 : Montréal, Québec)
Doane, Daryl Ann.
Heller, Adam.
Electrochemical Society. Dielectrics and Insulation Division.
Electrochemical Society. Electronics Division.
Electrochemical Society. New Technology Subcommittee.
Publication, Distribution, etc.: Pennington, NJ (10 South Main St., Pennington 08534) : Electrochemical Society
Publication Date: c1982.
Publication Date (W3CDTF): 1982
Extent: vii, 310 p. : ill. ; 23 cm.
Alternative Title: Inorganic resist systems.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Photoresists -- Congresses.
Photolithography -- Congresses.
LCC: TR940
DDC: 686.2/325
NDLC: M15
ND
Note (General): Title on spine: Inorganic resist systems.
Note (Bibliography): Includes bibliographical references and indexes.
Holding library: 国立国会図書館
Call No.: M15-A4170
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003107419
http://id.ndl.go.jp/bib/000003107419
LC Control Number: 82082860
https://lccn.loc.gov/82082860
Bibliographic Record Category (NDL): 211