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図書

Silicon processing : a symposium / sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, and Stanford University, San Jose, Calif., 19-22 Jan. 1982 / D.C. Gupta, editor. (ASTM special technical publication)

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Silicon processing : a symposium / sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, and Stanford University, San Jose, Calif., 19-22 Jan. 1982 / D.C. Gupta, editor.

(ASTM special technical publication)

Call No. (NDL)
ND371-A6
Bibliographic ID of National Diet Library
000003108240
Material type
図書
Author
Gupta, D. C. (Dinesh C.)ほか
Publisher
ASTM
Publication date
c1983.
Material Format
Paper
Capacity, size, etc.
559 p. : ill. ; 24 cm.
NDC
-
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Notes on use

Note (General)：

Papers presented at the Symposium on Silicon Processing, held in San Jose, Calif., Jan 19-22, 1982."ASTM publication code number (PCN) 04-804000-46."

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Paper

Material Type
図書
Title
Silicon processing : a symposium / sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, and Stanford University, San Jose, Calif., 19-22 Jan. 1982 / D.C. Gupta, editor.
Series Title
ASTM special technical publication
Author Heading
Gupta, D. C. (Dinesh C.)
ASTM Committee F-1 on Electronics.
United States. National Bureau of Standards.
Stanford University.
Symposium on Silicon Processing (1982 : San Jose, Calif.)
Publication, Distribution, etc.
Philadelphia, Pa. (1916 Race St., Philadelphia 19103) : ASTM
Publication Date
c1983.
Publication Date (W3CDTF)
1983
Extent
559 p. : ill. ; 24 cm.
Place of Publication (Country Code)
US
Text Language Code
eng