Advanced semiconductor processing and characterization of electronic and optical materials : January 24-25, 1984, Los Angeles, California / Devendra K. Sadana, Carl M. Lampert, chairmen/editors ; cooperating organizations, American Vacuum Society, Electronic Materials and Process Division. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 463)

Advanced semiconductor processing and characterization of electronic and optical materials : January 24-25, 1984, Los Angeles, California / Devendra K. Sadana, Carl M. Lampert, chairmen/editors ; cooperating organizations, American Vacuum Society, Electronic Materials and Process Division.

(Proceedings of SPIE--the International Society for Optical Engineering ; v. 463)

Call No. (NDL): M15-A4720
Bibliographic ID of National Diet Library: 000003115575

Material type: 図書

Author: Sadana, Devendra K.ほか

Publisher: SPIE--the International Society for Optical Engineering

Publication date: c1984.

Material Format: Paper

Capacity, size, etc.: vi, 147 p. : ill. ; 28 cm.

NDC: -

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Paper

Material Type: 図書
ISBN: 0892524987 (pbk.)
Title: Advanced semiconductor processing and characterization of electronic and optical materials : January 24-25, 1984, Los Angeles, California / Devendra K. Sadana, Carl M. Lampert, chairmen/editors ; cooperating organizations, American Vacuum Society, Electronic Materials and Process Division.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 463
Author Heading: Sadana, Devendra K.
Lampert, Carl M.
American Vacuum Society. Electronic Materials and Process Division.
Society of Photo-optical Instrumentation Engineers.
Publication, Distribution, etc.: Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering
Publication Date: c1984.
Publication Date (W3CDTF): 1984
Extent: vi, 147 p. : ill. ; 28 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Semiconductors -- Congresses.
LCC: TK7871.85
DDC: 621.3815/2
NDLC: M15
ND
Note (Bibliography): Includes bibliographies and index.
Holding library: 国立国会図書館
Call No.: M15-A4720
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003115575
http://id.ndl.go.jp/bib/000003115575
LC Control Number: 84050522 //r85
https://lccn.loc.gov/84050522
Bibliographic Record Category (NDL): 211