Advances in resist technology : March 12-13, 1984, Santa Clara, California / C. Grant Willson, chairman/editor. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 469)

Advances in resist technology : March 12-13, 1984, Santa Clara, California / C. Grant Willson, chairman/editor.

(Proceedings of SPIE--the International Society for Optical Engineering ; v. 469)

Call No. (NDL): M15-A4717
Bibliographic ID of National Diet Library: 000003115577

Material type: 図書

Author: Willson, C. G. (C. Grant) , 1939-ほか

Publisher: SPIE--the International Society for Optical Engineering

Publication date: c1984.

Material Format: Paper

Capacity, size, etc.: vi, 195 p. : ill. ; 28 cm.

NDC: -

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Paper

Material Type: 図書
ISBN: 0892525045 (pbk.)
Title: Advances in resist technology : March 12-13, 1984, Santa Clara, California / C. Grant Willson, chairman/editor.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 469
Author Heading: Willson, C. G. (C. Grant) , 1939-
Society of Photo-optical Instrumentation Engineers.
Publication, Distribution, etc.: Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering
Publication Date: c1984.
Publication Date (W3CDTF): 1984
Extent: vi, 195 p. : ill. ; 28 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Photoresists -- Congresses.
LCC: TR940
DDC: 686.2/325
NDLC: M15
ND
Note (Bibliography): Includes bibliographies and index.
Holding library: 国立国会図書館
Call No.: M15-A4717
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003115577
http://id.ndl.go.jp/bib/000003115577
LC Control Number: 84050823 //r85
https://lccn.loc.gov/84050823
Bibliographic Record Category (NDL): 211