SEMICON/Europa '82 : the third SEMI European Symposium on VLSI Processing, Zurich, Switzerland.

Notes on use

Note (General)：: "Presented by Semiconductor Equipment and Materials Institute, Inc."Includes bibliographical references.

Search by Bookstore

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 図書
Title: SEMICON/Europa '82 : the third SEMI European Symposium on VLSI Processing, Zurich, Switzerland.
Author Heading: SEMI European Symposium on VLSI Processing (3rd : 1982 : Zurich)
Semiconductor Equipment and Materials Institute.
Publication, Distribution, etc.: Mountain View, Calif. : Semiconductor Equipment and Materials Insitute
Publication Date: [1982?]
Publication Date (W3CDTF): 1982
Extent: iii, 118 p. : ill. ; 28 cm.
NDLC: M15
ND
Note (General): "Presented by Semiconductor Equipment and Materials Institute, Inc."
Includes bibliographical references.
Holding library: 国立国会図書館
Call No.: M15-A3223
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003122228
http://id.ndl.go.jp/bib/000003122228
Bibliographic Record Category (NDL): 211