SEMICON/Europa 1983 : Semiconductor Processing and Equipment Symposium, March 8-10, Zuespa Convention Center, Zurich, Switzerland.

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Note (General)：: Cover title: Semiconductor Processing and Equipment Symposium technical proceedings."Presented by Semiconductor Equipment and Materials Institute, Inc...

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Material Type: 図書
Title: SEMICON/Europa 1983 : Semiconductor Processing and Equipment Symposium, March 8-10, Zuespa Convention Center, Zurich, Switzerland.
Author Heading: Semiconductor Processing and Equipment Symposium (1983 : Zurich)
Semiconductor Equipment and Materials Institute.
Publication, Distribution, etc.: Mountain View, Calif. : Semiconductor Equipment and Materials Institute
Publication Date: [1983?].
Publication Date (W3CDTF): 1983
Extent: vi, 347 p. : ill. ; 29 cm.
NDLC: M15
ND
Note (General): Cover title: Semiconductor Processing and Equipment Symposium technical proceedings.
"Presented by Semiconductor Equipment and Materials Institute, Inc."
Includes bibliographical references.
Holding library: 国立国会図書館
Call No.: M15-A3214
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003122229
http://id.ndl.go.jp/bib/000003122229
Bibliographic Record Category (NDL): 211