Proceedings of the fourth Symposium on Plasma Processing / edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky. (Proceedings)

Proceedings of the fourth Symposium on Plasma Processing / edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky.

(Proceedings)

Author: Symposium on Plasma Processing (4th : 1983 : San Francisco, Calif.)ほか

Publisher: Dielectrics and Insulation and Electronics Divisions, Electrochemical Society

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Material Type: 図書
Title: Proceedings of the fourth Symposium on Plasma Processing / edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky.
Series Title: Proceedings
Author/Editor (Series Title): The Electrochemical Society
v. 83-10
Title Heading: Proceedings (Electrochemical Society) ; v. 83-10.
Author Heading: Symposium on Plasma Processing (4th : 1983 : San Francisco, Calif.)
Mathad, G. S.
Schwartz, G. C.
Smolinsky, G.
Publication, Distribution, etc.: Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Dielectrics and Insulation and Electronics Divisions, Electrochemical Society
Publication Date: c1983.
Publication Date (W3CDTF): 1983
Extent: x, 649 p. : ill. ; 23 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Plasma engineering -- Congresses.
LCC: TA2005
DDC: 621/.044
NDLC: M15
ND
Note (Bibliography): Includes bibliographical references and indexes.
Holding library: 国立国会図書館
Call No.: M15-A1764
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003124028
http://id.ndl.go.jp/bib/000003124028
LC Control Number: 83082041
https://lccn.loc.gov/83082041
Bibliographic Record Category (NDL): 211