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図書

Microelectronics processing : chemical engineering aspects / Dennis W. Hess, editor, Klavs F. Jensen, editor. (Advances in chemistry series)

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Microelectronics processing : chemical engineering aspects / Dennis W. Hess, editor, Klavs F. Jensen, editor.

(Advances in chemistry series)

Call No. (NDL)
ND386-A19
Bibliographic ID of National Diet Library
000003180165
Material type
図書
Author
Hess, Dennis W.ほか
Publisher
American Chemical Society
Publication date
1989.
Material Format
Paper
Capacity, size, etc.
xiv, 547 p. : ill. ; 24 cm.
NDC
-
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Paper

Material Type
図書
ISBN
0841214751
ISSN (series)
0065-2393
Title
Microelectronics processing : chemical engineering aspects / Dennis W. Hess, editor, Klavs F. Jensen, editor.
Series Title
Advances in chemistry series
Author Heading
Hess, Dennis W.
Jensen, Klavs F., 1952-
Publication, Distribution, etc.
Washington, DC : American Chemical Society
Publication Date
1989.
Publication Date (W3CDTF)
1989
Extent
xiv, 547 p. : ill. ; 24 cm.