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図書

300mm Physical Interfaces and Carriers SEAJ/SEMI Joint Seminar : 1997 spring update, Friday, May 30 1997 ... Osaka, Japan / planned by 300mm Physical Interfaces and Carriers SEAJ/SEMI-J Joint Committee ; [editors, Terry Asakawa ... et al.].

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300mm Physical Interfaces and Carriers SEAJ/SEMI Joint Seminar : 1997 spring update, Friday, May 30 1997 ... Osaka, Japan / planned by 300mm Physical Interfaces and Carriers SEAJ/SEMI-J Joint Committee ; [editors, Terry Asakawa ... et al.].

Call No. (NDL)
M18-A197
Bibliographic ID of National Diet Library
000003255549
Material type
図書
Author
300mm Physical Interfaces and Carriers SEAJ/SEMI Joint Seminar (1997 : Osaka)ほか
Publisher
SEMI-Japan
Publication date
1997.
Material Format
Paper
Capacity, size, etc.
1 v. (various pagings) : ill. ; 30 cm.
NDC
-
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Notes on use

Note (General)：

"講演資料"--Colophon.Prefatory matter and appendixes in English and Japanese.Cover title.

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Paper

Material Type
図書
Title
300mm Physical Interfaces and Carriers SEAJ/SEMI Joint Seminar : 1997 spring update, Friday, May 30 1997 ... Osaka, Japan / planned by 300mm Physical Interfaces and Carriers SEAJ/SEMI-J Joint Committee ; [editors, Terry Asakawa ... et al.].
Author Heading
300mm Physical Interfaces and Carriers SEAJ/SEMI Joint Seminar (1997 : Osaka)
浅川, 輝雄 アサカワ, テルオ ( 00818513 )Authorities
日本半導体製造装置協会 ニホン ハンドウタイ セイゾウ ソウチ キョウカイ ( 00293650 )Authorities
Semiconductor Equipment and Materials International.
Publication, Distribution, etc.
Tokyo : SEMI-Japan
Publication Date
1997.
Publication Date (W3CDTF)
1997
Extent
1 v. (various pagings) : ill. ; 30 cm.
Place of Publication (Country Code)
JP
Text Language Code
eng
jpn
NDLC
M18
ND371