Proceedings : the Fourth International Symposium on Sputtering & Plasma Processes, ISSP '97 : subject, sputtering & plasma processes for advanced devices, June 4-6, 1997, Kanazawa Institute of Technology, Kanazawa, Ishikawa Japan / sponsored by the Study Committee of Sputtering & Plasma Processes, Japan Technology Transfer Association ; assisting societies, The Japan Society of Applied Physics ... [et al.].

Proceedings : the Fourth International Symposium on Sputtering & Plasma Processes, ISSP '97 : subject, sputtering & plasma processes for advanced devices, June 4-6, 1997, Kanazawa Institute of Technology, Kanazawa, Ishikawa Japan / sponsored by the Study Committee of Sputtering & Plasma Processes, Japan Technology Transfer Association ; assisting societies, The Japan Society of Applied Physics ... [et al.].

Call No. (NDL): M18-A196
Bibliographic ID of National Diet Library: 000003255672

Material type: 図書

Author: International Symposium on Sputtering & Plasma Processes (4th : 1997 : Kanazawa)

Publisher: ISSP '97 Committee

Publication date: 1997.

Material Format: Paper

Capacity, size, etc.: viii, 690 p. : ill. ; 30 cm.

NDC: -

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Notes on use

Note (General)：: "Symposium program" and 3 papers inserted.Includes bibliographical references.

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Paper

Material Type: 図書
ISSN: 0917-2440
Title: Proceedings : the Fourth International Symposium on Sputtering & Plasma Processes, ISSP '97 : subject, sputtering & plasma processes for advanced devices, June 4-6, 1997, Kanazawa Institute of Technology, Kanazawa, Ishikawa Japan / sponsored by the Study Committee of Sputtering & Plasma Processes, Japan Technology Transfer Association ; assisting societies, The Japan Society of Applied Physics ... [et al.].
Author Heading: International Symposium on Sputtering & Plasma Processes (4th : 1997 : Kanazawa)
Publication, Distribution, etc.: Tokyo : ISSP '97 Committee
Publication Date: 1997.
Publication Date (W3CDTF): 1997
Extent: viii, 690 p. : ill. ; 30 cm.
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: M18
MC141
Note (General): "Symposium program" and 3 papers inserted.
Includes bibliographical references.
Holding library: 国立国会図書館
Call No.: M18-A196
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003255672
http://id.ndl.go.jp/bib/000003255672
Bibliographic Record Category (NDL): 211