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博士論文

Precision Machine Design for the Semiconductor Equipment Manufacturing Industry

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Precision Machine Design for the Semiconductor Equipment Manufacturing Industry

Call No. (NDL)
LS-DIMIT-95-374
Bibliographic ID of National Diet Library
000003376065
Material type
博士論文
Author
Van Doren, Matthew James.
Publisher
Massachusetts Institute of Technology
Publication date
1995.
Material Format
Microform
Capacity, size, etc.
4 microfiches (303 fr.) : negative, ill.
Name of awarding university/degree
Massachusetts Institute of Technology
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Microform

Material Type
博士論文
Author/Editor
Van Doren, Matthew James.
Publication Date
1995.
Extent
4 microfiches (303 fr.) : negative, ill.
Degree grantor/type
Massachusetts Institute of Technology
Date Granted
1995.
Date Granted (W3CDTF)
1995