Quantitative Modelling for Optimization of the Czochralski Growth of Silicon

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Material Type: 博士論文
Title: Quantitative Modelling for Optimization of the Czochralski Growth of Silicon
Author/Editor: Kinney, Thomas Arthur.
Author Heading: Kinney, Thomas Arthur.
Publication, Distribution, etc.: Cambridge : Massachusetts Institute of Technology
Publication Date: 1992.
Extent: 296 p.
Degree grantor/type: Massachusetts Institute of Technology
Date Granted: 1992.
Date Granted (W3CDTF): 1992
Note (Dissertation): 博士論文
Thesis (doctoral) --Massachusetts Institute of Technology, 1992.
Place of Publication (Country Code): US
Text Language Code: eng
Note (Material Type): [microform]
Note (General): Microfiche.
Note (Bibliography): Includes bibliographies.
Holding library: 国立国会図書館
Call No.: LS-DI-MIT-92-193
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003378735
http://id.ndl.go.jp/bib/000003378735
Bibliographic Record Category (NDL): 216